Toward New Shores in 2023 - Welcome to the EMLC Conference 2023 in Dresden, Germany
The EMLC Conference annually brings together scientists, researchers, engineers and technicians from research institutes and companies from around the world to present their latest findings in mask and lithography techniques. The EMLC 2023 conference is dedicated to research, technology and related processes. It provides an overview of the current state of mask and lithography technologies and future strategy. Here, mask manufacturers and users have the opportunity to familiarize themselves with the latest developments and results.
May we give you a short preview of the Conference Program? We have the pleasure to announce following Tutorials:
1st Tutorial "Technology of EUV Lithography Optics"
Bernhard Kneer, Carl Zeiss SMT, Oberkochen, Germany
on Monday, June 19, 14:10 – 15:15
2nd Tutorial "Current Status and Prospect for EUV Lithography"
Takeo Watanabe, University of Hyogo, Japan
on Monday, June 19, 15:15 – 16:15
May we also suggest you to benefit from the technical sessions and the exhibition of the EMLC Conference 2023, but also to enjoy the beautiful flair of the City of Dresden!
Uwe Behringer, Conference Chair