EMLC 2022 - Toward New Shores in 2022
May we also inform you that the EMLC Committee Members are optimistic - for this reason they already started planning the 37th EMLC Conference which will take place in Leuven, Belgium, from 20 - 23 June 2022, hopefully as face-to-face-event in the usual form.
Welcome to the EMLC 2022 in Leuven, Belgium
On behalf of the VDE/VDI/GMM Organization, the EMLC 2022 Sponsors and the EMLC 2022 Organization Committee we would like to welcome you to the 37th European Mask and Lithography Conference, EMLC 2022, at the KU University in Leuven, Belgium.
The conference annually brings together scientists, researchers, engineers and technicians from research institutes and companies from around the world to present their latest findings in mask and lithography techniques. The EMLC 2022 conference is dedicated to research, technology and related processes. It provides an overview of the current state of mask and lithography technologies and future strategy. Here, mask manufacturers and users have the opportunity to familiarize themselves with the latest developments and results.
Planned Conference Program
3 Tutorials and 3 Keynotes and more than 15 Invited Speakers.
1st TUTORIAL: Peter De Bisschop, IMEC, Leuven, Belgium "Stochastic effects in lithography: the ultimate resolution limit?”
2nd TUTORIAL: Rogier Verberk, TNO, Delft, The Netherlands “Synergy between Quantum Computing and SC Technology”
3rd TUTORIAL: Takeo Watanabe, University of Hyogo, Japan “Current status and prospect for EUV lithography”
On Tuesday, June 21st, there are two Plenary Sessions and conference Sessions "Mask Patterning, Metrology & Process"; “EUV Lithography”; “Quantum Computing & Photonics”; followed by the 2nd part of the “Poster Session”.
In the Plenary Sessions, we have the honor of the first Keynote speaker Luc Van Den Hove, IMEC, Leuven, Belgium.
The second Keynote speaker will be Frank E. Abboud, Intel Corporation, Santa Clara, CA, USA, who will talk about “Photomask Challenges for Upcoming Technology Nodes”.
On Tuesday afternoon the third Keynote speaker Jos P.H. Benschop, ASML, Veldhoven, The Netherlands, will report on “EUV Lithography; past, present and future”.
On Wednesday, June 22nd, the conference will start with the Announcement of the EMLC 2022 Best Poster Award, followed by the BACUS 2022 and PMJ 2022 Conference Announcements.
As every year we will have invited presentations of the Best Poster of BACUS 2021 and of the Best Paper of PMJ 2022.
As next Session “Data Analytics in Manufacturing” will continue on Wednesday, June 2022, followed by the “EUV Mask Inspection & Repair” Session. Also in the afternoon we have set up a Session called “Lithography Simulation and Future Nano-Lithography & Nano-Patterning”.
Finally, the last session will be focused on “Student Oral Presentations”.
Technical Exhibition
Parallel to the EMLC 2022 conference the "Technical Exhibition" will take place in the Jubilee Hall of KU Leuven. The opening hours are Tuesday, June 21st, from 10:00 AM to 6:00 PM and Wednesday, June 22nd, from 10:00 AM to 4:00 PM. Here mask and device manufacturers will present their companies and their products.
Conference Dinner Banquet
On Tuesday evening, June 21st, 2022 after the Poster Session, the EMLC 2022 Conference Dinner will take place at the “Faculty Club” in Leuven (within ten minutes’ walk from the conference site).
Thursday Morning, June 23rd, 2022 after the EMLC2022 Conference, IMEC in Leuven has agreed to organize
a visit at IMEC.
A bus will take the signed people (maximum 50 participants) to the IMEC facility. The tour will start at 09:40 AM from the Faculty Club where we had dinner on Tuesday.
Uwe Behringer
