38th Mask and Lithography Conference 2023 | Dresden, Germany | June 19-21, 2023
Conference Program


Toward New Shores in 2023 - Welcome to the EMLC Conference 2023 in Dresden, Germany

The EMLC Conference annually brings together scientists, researchers, engineers and technicians from research institutes and companies from around the world to present their latest findings in mask and lithography techniques. The EMLC 2023 conference is dedicated to research, technology and related processes. It provides an overview of the current state of mask and lithography technologies and future strategy. Here, mask manufacturers and users have the opportunity to familiarize themselves with the latest developments and results.

May we give you a short preview of the Conference Program? We have the pleasure to announce following Tutorials:

1st Tutorial "Technology of EUV Lithography Optics"
Bernhard Kneer, Carl Zeiss SMT, Oberkochen, Germany
on Monday, June 19, 14:10 – 15:15

2nd Tutorial "Current Status and Prospect for EUV Lithography"
Takeo Watanabe, University of Hyogo, Japan
on Monday, June 19, 15:15 – 16:15

May we also suggest you to benefit from the technical sessions and the exhibition of the EMLC Conference 2023, but also to enjoy the beautiful flair of the City of Dresden!

Uwe Behringer, Conference Chair


Dr. Uwe Behringer, UBC Microelectronics
Conference Chair

target audience

Target Audience

The EMLC Conference annually brings together scientists, researchers, engineers and developers from around the world to present innovations at the forefront of research, manufacturing and application.

target audience

The EMLC Conference annually brings together scientists, researchers, engineers and developers from around the world to present innovations at the forefront of research, manufacturing and application.

It provides a place where specialists from industry and advanced research as well as equipment and software providers become acquainted with new developments and results.


Conference topics


Mask Manufacturing and Mask Business
- Mask Data Preparation
- Pattern Generation: Writing, Etch, etc.
- Photomask Processes & Materials
- Metrology Tools & Technologies
- Defect Inspection & Repair
- Cleaning & Haze
- Pellicles & Mask Boxes
- Mask Process Yield & Cycle Time
- Photomasks for RET (OPC, ILT) ; PSM
- Mask Business and Management
- Mask Cost and Mask Development Strategy
- Future Mask Demand
Lithographic Systems and Processes
- Optical Resolution Enhancements including OPC,
Freeform Illumination, Source-Mask-optimization (SMO)
and Inverse Lithography Technology (ILT)
- Material-and Process driven Resolution Enhancements
including Multiple Patterning and Chemical Shrinking
- Immersion Lithography including Defectivity
- Lithography Process Control
- Lithography and Etch Simulation including rigorous
physical/chemical Models and Compact Models
Emerging Mask and Lithography Technologies
- EUV-Lithography including Masks, Materials Processes
and Infrastructure.
- Direct Write / Maskless Technologies including Multi-
Beam Technologies
- Nano-Imprint Lithography (NIL), Soft Lithography, and
- Applicationof Artificial Intelligence including Deep
Learning in Lithography
Emerging Applications
- Non-IC Applications including Si-Photonics, flat Panel
Displays and MEMS/MEOMS
- Lithographic Systems for non-IC Applications, including
Laser Direct Write, Interference Lithography, and Mask


Committee Members


The EMLC 2023 International Program Committee

Conference Chairs
Behringer, Uwe, UBC Microelectronics, Ammerbuch, Germany
Finders, Jo, ASML, Veldhoven, The Netherlands

Conference Co-Chairs
Connolly, Brid, Toppan Photomasks Inc., Dresden, Germany
Gale, Chris, Applied Materials, Dresden, Germany
Hayashi, Naoya, DNP, Saitama, Japan

Program Chairs
Stolberg, Ines, Vistec Electron Beam, Jena, Germany
Erdmann, Andreas, Fraunhofer IISB, Erlangen, Germany
Loeschner, Hans, IMS Nanofabrication, Vienna, Austria

Program Co-Chairs
Peters, Jan Hendrik, BMBG Consult, Radebeul, Germany
Sarlette, Daniel, Infineon, Dresden, Germany

Other Program Committee Members
Abboud, Frank, Intel Corporation, Santa Clara, CA, USA
Born, René, Photronics MZB GmbH, Dresden, Germany
Ehrmann, Albrecht, Carl Zeiss SMT Oberkochen, Germany
Galler, Reinhard, Equicon, Jena, Germany
Le Gratiet, Bertrand, ST Microelectronics, Crolles, France
Levinson, Harry J., HJL Lithography, Saratoga, CA, USA
Muehlberger, Michael, Profactor GmbH, Steyr-Gleink, Austria
Noack, Nico, AMTC Dresden, Germany
Pain, Laurent, CEA, Grenoble, France
Ronse, Kurt, IMEC, Leuven, Belgium
Savari, Serap, Texas A&M University College Station, USA
Scheruebl, Thomas, Carl Zeiss SMT GmbH, Jena, Germany
Schnabel, Ronald, VDE/VDI-GMM, Frankfurt, Germany
Schulze, Steffen, Mentor Graphics Corp. Wilsonville, OR, USA
Seltmann, Rolf, Dresden, Germany
Shushuke, Yoshitake, NuFlare, Japan
Sundermann, Frank, STMicroelectronics, Crolles, France
Tiron, Raluca, Grenoble, France
Tschinkl, Martin, Toppan Photomasks Germany GmbH, Dresden, Germany
Waelpoel, Jacques, ASML, Veldhoven The Netherlands
Wurm, Stefan, ATICE LLC, Albany, NY, USA
Zurbrick, Larry, Keysight Technologies, Santa Clara, CA, USA

ZEISS Award for Talents in Photomask Industry

ZEISS endows the "ZEISS Award for Talents in Photomask Industry" 

The award was established in 2016 to support students working in the fields of photomasks.

To be considered,

  • The student must present a poster or presentation at European Mask and Lithography Conference
  • The students must identify themselves as a student during abstract submission
  • The student must be the lead manuscript author
  • The student must attend the conference and present it during the session or be present during the poster session

The award will be assessed by an award committee consisting of members of the EMLC Program Committee. Contributions will be judged for technical merit, relevance of the topic to the industry and the author’s ability to explain the work.

Winners will be awarded a ZEISS certificate and a trophy. In addition, the winner will be invited to present his or her work at SPIE Photomask Technology + Extreme Ultraviolet Lithography Conference 2023 in Monterey / CA. He or she receives a donation of 2,500 EUR to cover the travel expenses.

"Schnuppertag" - Taster Day for Students

Come to the EMLC Conference for a Taster

Offer to all students: Visit the EMLC Conference on 19 June for free

The program on June 19 includes

  • Tutorial Sessions
  • Student Presentations
  • Get Together

For registration, please use the link in the download section.

Downloads + Links

Technical Exhibition


Parallel to the EMLC 2023 Conference, there will be a Technical Exhibition with booth space for about 30 exhibitors on Tuesday and Wednesday (June 20th and 21st 2023) . Presentation tables and pin boards will be available.

During the exhibition hours, mask and device manufacturers will present their companies and their products.
Please, register in time for the exhibition!

Technical Exhibition Download

Venue/ Travel Info/ Hotel booking

Hilton Dresden
An der Frauenkirche 5, 01067 Dresden, 
phone: +49 (0)351 8642-0
E-Mail: info@hiltondresden.com

Hilton Hotel Dresden - on the doorstep of Dresden's Old Town - Your Event Location

The Hilton Hotel is located at the heart of Dresden's Old Town, one block from the River Elbe and overlooking Dresden's Frauenkirche, the Church of Our Lady. Hilton is within a kilometer of local dining and historic sites, such as the Zwinger building and its surrounding gardens. Enjoy access to the health club, featuring a fitness center, indoor pool with sauna, outdoor whirlpool - and, above all: Enjoy the EMLC Conference 2023 in Dresden!

The room rate is € 139 per night including breakfast.
Please book your rooms in time as the room contingent expires on May 9, 2023.

Please use the underlined link for your bookings!



Downloads + Links
Contact ak


Contact ak

Please contact GMM-Office for questions concerning the conference.

You would like to be informed about the next steps concerning this conference? So please register as prospective customer.

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previous events

Previous Events

Important Dates

Dates in 2023

February 24, 2023

Submission of abstracts

April 14, 2023

Notification of authors

July 20, 2023

Submission of presentation material

June 19-21, 2023

EMLC Conference 2023 in Dresden, Germany

June 30, 2023

Submission of manuscripts to SPIE

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