Previous Events

VDE has been organising this conference since 1996. Dr. Uwe Behringer was the EMLC Conference Chair from 1993 - 2025. Starting 2025, Ines Stolberg (Vistec Electron Beam) and Jo Finders (ASML) have jointly taken over the leadership of the conference, while Hans Löschner (IMS Nanofabrication) continues to fill the role of Program Chair. Detailed information on previous events can be found here.